Roger T Howe
Roger T Howe
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Cited by
Cited by
Laterally driven polysilicon resonant microstructures
WC Tang, TCH Nguyen, RT Howe
Sensors and actuators 20 (1-2), 25-32, 1989
Critical review: Adhesion in surface micromechanical structures
R Maboudian, RT Howe
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1997
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
Electrostatic-comb drive of lateral polysilicon resonators
WC Tang, TCH Nguyen, MW Judy, RT Howe
Sensors and Actuators A: Physical 21 (1-3), 328-331, 1990
Three-dimensional integration of nanotechnologies for computing and data storage on a single chip
MM Shulaker, G Hills, RS Park, RT Howe, K Saraswat, HSP Wong, S Mitra
Nature 547 (7661), 74-78, 2017
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
U Srinivasan, MR Houston, RT Howe, R Maboudian
Journal of Microelectromechanical Systems 7 (2), 252-260, 1998
Microstructure to substrate self-assembly using capillary forces
U Srinivasan, D Liepmann, RT Howe
Journal of microelectromechanical systems 10 (1), 17-24, 2001
Photon-enhanced thermionic emission for solar concentrator systems
JW Schwede, I Bargatin, DC Riley, BE Hardin, SJ Rosenthal, Y Sun, ...
Nature materials 9 (9), 762-767, 2010
An integrated CMOS micromechanical resonator high-Q oscillator
CTC Nguyen, RT Howe
IEEE Journal of Solid-State Circuits 34 (4), 440-455, 1999
Surface micromachined accelerometers
BE Boser, RT Howe
IEEE Journal of solid-state circuits 31 (3), 366-375, 1996
Microelectromechanical filters for signal processing
L Lin, RT Howe, AP Pisano
Journal of Microelectromechanical systems 7 (3), 286-294, 1998
A vacuum packaged surface micromachined resonant accelerometer
AA Seshia, M Palaniapan, TA Roessig, RT Howe, RW Gooch, ...
Journal of Microelectromechanical systems 11 (6), 784-793, 2002
Laterally driven resonant microstructures
WC Tang, RT Howe
US Patent 5,025,346, 1991
Electrostatic comb drive levitation and control method
WC Tang, MG Lim, RT Howe
Journal of Microelectromechanical systems 1 (4), 170-178, 1992
Supercritical carbon dioxide drying of microstructures
GT Mulhern
Proc. Transducers' 93, Yokohama, June, 296-299, 1993
Surface micromachining for microsensors and microactuators
RT Howe
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1988
Microfabricated structures for the insitu measurement of residual stress, Young’s modulus, and ultimate strain of thin films
MG Allen, M Mehregany, RT Howe, SD Senturia
Applied Physics Letters 51 (4), 241-243, 1987
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
Surface micromachined Z-axis vibratory rate gyroscope
WA Clark, RT Howe, R Horowitz
Tech. Dig. Solid-state sensor and actuator workshop, 283-287, 1996
An integrated force-balanced capacitive accelerometer for low-g applications
KHL Chau, SR Lewis, Y Zhao, RT Howe, SF Bart, RG Marcheselli
Sensors and Actuators A: Physical 54 (1-3), 472-476, 1996
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