| Laterally driven polysilicon resonant microstructures WC Tang, TCH Nguyen, RT Howe Sensors and actuators 20 (1-2), 25-32, 1989 | 1724 | 1989 |
| Critical review: Adhesion in surface micromechanical structures R Maboudian, RT Howe Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1997 | 1086 | 1997 |
| Surface micromachining for microelectromechanical systems JM Bustillo, RT Howe, RS Muller Proceedings of the IEEE 86 (8), 1552-1574, 1998 | 1026 | 1998 |
| Three-dimensional integration of nanotechnologies for computing and data storage on a single chip MM Shulaker, G Hills, RS Park, RT Howe, K Saraswat, HSP Wong, S Mitra Nature 547 (7661), 74-78, 2017 | 715 | 2017 |
| Electrostatic-comb drive of lateral polysilicon resonators WC Tang, TCH Nguyen, MW Judy, RT Howe Sensors and Actuators A: Physical 21 (1-3), 328-331, 1990 | 699 | 1990 |
| Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines U Srinivasan, MR Houston, RT Howe, R Maboudian Journal of Microelectromechanical Systems 7 (2), 252-260, 1998 | 599 | 1998 |
| Microstructure to substrate self-assembly using capillary forces U Srinivasan, D Liepmann, RT Howe Journal of microelectromechanical systems 10 (1), 17-24, 2001 | 582 | 2001 |
| Photon-enhanced thermionic emission for solar concentrator systems JW Schwede, I Bargatin, DC Riley, BE Hardin, SJ Rosenthal, Y Sun, ... Nature materials 9 (9), 762-767, 2010 | 572 | 2010 |
| An integrated CMOS micromechanical resonator high-Q oscillator CTC Nguyen, RT Howe IEEE Journal of Solid-State Circuits 34 (4), 440-455, 1999 | 543 | 1999 |
| Surface micromachined accelerometers BE Boser, RT Howe IEEE Journal of solid-state circuits 31 (3), 366-375, 1996 | 476 | 1996 |
| Microelectromechanical filters for signal processing L Lin, RT Howe, AP Pisano Journal of Microelectromechanical systems 7 (3), 286-294, 1998 | 473 | 1998 |
| A vacuum packaged surface micromachined resonant accelerometer AA Seshia, M Palaniapan, TA Roessig, RT Howe, RW Gooch, ... Journal of Microelectromechanical systems 11 (6), 784-793, 2002 | 441 | 2002 |
| Laterally driven resonant microstructures WC Tang, RT Howe US Patent 5,025,346, 1991 | 439 | 1991 |
| Electrostatic comb drive levitation and control method WC Tang, MG Lim, RT Howe Journal of Microelectromechanical systems 1 (4), 170-178, 1992 | 419 | 1992 |
| Supercritical carbon dioxide drying of microstructures GT Mulhern Proc. Transducers' 93, Yokohama, June, 296-299, 1993 | 398 | 1993 |
| Surface micromachining for microsensors and microactuators RT Howe Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1988 | 374 | 1988 |
| Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films MG Allen, M Mehregany, RT Howe, SD Senturia Applied Physics Letters 51 (4), 241-243, 1987 | 361 | 1987 |
| Resonant-microbridge vapor sensor RT Howe, RS Muller IEEE Transactions on Electron Devices 33 (4), 499-506, 1986 | 361 | 1986 |
| Surface micromachined Z-axis vibratory rate gyroscope WA Clark, RT Howe, R Horowitz Tech. Dig. Solid-state sensor and actuator workshop, 283-287, 1996 | 354 | 1996 |
| An integrated force-balanced capacitive accelerometer for low-g applications KHL Chau, SR Lewis, Y Zhao, RT Howe, SF Bart, RG Marcheselli Sensors and Actuators A: Physical 54 (1-3), 472-476, 1996 | 317 | 1996 |
