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Roger T Howe
Roger T Howe
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Title
Cited by
Cited by
Year
Laterally driven polysilicon resonant microstructures
WC Tang, TCH Nguyen, RT Howe
Sensors and actuators 20 (1-2), 25-32, 1989
17231989
Critical review: Adhesion in surface micromechanical structures
R Maboudian, RT Howe
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1997
10921997
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
10241998
Electrostatic-comb drive of lateral polysilicon resonators
WC Tang, TCH Nguyen, MW Judy, RT Howe
Sensors and Actuators A: Physical 21 (1-3), 328-331, 1990
6981990
Three-dimensional integration of nanotechnologies for computing and data storage on a single chip
MM Shulaker, G Hills, RS Park, RT Howe, K Saraswat, HSP Wong, S Mitra
Nature 547 (7661), 74-78, 2017
6932017
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
U Srinivasan, MR Houston, RT Howe, R Maboudian
Journal of Microelectromechanical Systems 7 (2), 252-260, 1998
6081998
Microstructure to substrate self-assembly using capillary forces
U Srinivasan, D Liepmann, RT Howe
Journal of microelectromechanical systems 10 (1), 17-24, 2001
5802001
Photon-enhanced thermionic emission for solar concentrator systems
JW Schwede, I Bargatin, DC Riley, BE Hardin, SJ Rosenthal, Y Sun, ...
Nature materials 9 (9), 762-767, 2010
5662010
An integrated CMOS micromechanical resonator high-Q oscillator
CTC Nguyen, RT Howe
IEEE Journal of Solid-State Circuits 34 (4), 440-455, 1999
5431999
Surface micromachined accelerometers
BE Boser, RT Howe
IEEE Journal of solid-state circuits 31 (3), 366-375, 1996
4751996
Microelectromechanical filters for signal processing
L Lin, RT Howe, AP Pisano
Journal of Microelectromechanical systems 7 (3), 286-294, 1998
4741998
A vacuum packaged surface micromachined resonant accelerometer
AA Seshia, M Palaniapan, TA Roessig, RT Howe, RW Gooch, ...
Journal of Microelectromechanical systems 11 (6), 784-793, 2002
4412002
Laterally driven resonant microstructures
WC Tang, RT Howe
US Patent 5,025,346, 1991
4391991
Electrostatic comb drive levitation and control method
WC Tang, MG Lim, RT Howe
Journal of Microelectromechanical systems 1 (4), 170-178, 1992
4171992
Supercritical carbon dioxide drying of microstructures
GT Mulhern
Proc. Transducers' 93, Yokohama, June, 296-299, 1993
3961993
Surface micromachining for microsensors and microactuators
RT Howe
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1988
3771988
Microfabricated structures for the insitu measurement of residual stress, Young’s modulus, and ultimate strain of thin films
MG Allen, M Mehregany, RT Howe, SD Senturia
Applied Physics Letters 51 (4), 241-243, 1987
3641987
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3641986
Surface micromachined Z-axis vibratory rate gyroscope
WA Clark, RT Howe, R Horowitz
Tech. Dig. Solid-state sensor and actuator workshop, 283-287, 1996
3561996
An integrated force-balanced capacitive accelerometer for low-g applications
KHL Chau, SR Lewis, Y Zhao, RT Howe, SF Bart, RG Marcheselli
Sensors and Actuators A: Physical 54 (1-3), 472-476, 1996
3221996
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