Temperature dependence of quality factor in MEMS resonators B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ... Journal of Microelectromechanical systems 17 (3), 755-766, 2008 | 335 | 2008 |
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ... Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006 | 252 | 2006 |
Temperature-insensitive composite micromechanical resonators R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ... Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009 | 207 | 2009 |
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators B Kim, RN Candler, MA Hopcroft, M Agarwal, WT Park, TW Kenny Sensors and Actuators A: Physical 136 (1), 125-131, 2007 | 186 | 2007 |
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 177 | 2006 |
Temperature-compensated high-stability silicon resonators R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ... Applied physics letters 90 (24), 2007 | 151 | 2007 |
Thermal isolation of encapsulated MEMS resonators CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ... Journal of Microelectromechanical Systems 17 (1), 175-184, 2008 | 101 | 2008 |
Using the temperature dependence of resonator quality factor as a thermometer MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ... Applied physics letters 91 (1), 2007 | 98 | 2007 |
Effects of stress on the temperature coefficient of frequency in double clamped resonators R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ... The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 92 | 2005 |
Optimal drive condition for nonlinearity reduction in electrostatic microresonators M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ... Applied physics letters 89 (21), 2006 | 91 | 2006 |
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 74 | 2007 |
Frequency stability of wafer-scale encapsulated MEMS resonators B Kim, RN Candler, M Hopcroft, M Agarwal, WT Park, TW Kenny The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 70 | 2005 |
Composite mechanical transducers and approaches therefor R Melamud, B Kim, M Hopcroft, S Chandorkar, M Agarwal, TW Kenny US Patent 7,824,098, 2010 | 64 | 2010 |
A study of electrostatic force nonlinearities in resonant microstructures M Agarwal, SA Chandorkar, H Mehta, RN Candler, B Kim, MA Hopcroft, ... Applied Physics Letters 92 (10), 2008 | 64 | 2008 |
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ... Journal of Applied Physics 102 (7), 2007 | 63 | 2007 |
High resolution microresonator-based digital temperature sensor CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... Applied physics letters 91 (7), 2007 | 61 | 2007 |
Temperature compensation of a MEMS resonator using quality factor as a thermometer MA Hopcroft, M Agarwal, KK Park, B Kim, CM Jha, RN Candler, G Yama, ... 19th IEEE International Conference on Micro Electro Mechanical Systems, 222-225, 2006 | 59 | 2006 |
Model and observations of dielectric charge in thermally oxidized silicon resonators G Bahl, R Melamud, B Kim, SA Chandorkar, JC Salvia, MA Hopcroft, ... Journal of Microelectromechanical Systems 19 (1), 162-174, 2009 | 58 | 2009 |
Nonlinear characterization of electrostatic MEMS resonators M Agarwal, KK Park, RN Candler, B Kim, MA Hopcroft, SA Chandorkar, ... 2006 IEEE International Frequency Control Symposium and Exposition, 209-212, 2006 | 53 | 2006 |
System identification and 6-DOF hovering controller design of unmanned model helicopter B Kim, Y Chang, MH Lee JSME International Journal Series C Mechanical Systems, Machine Elements and …, 2006 | 52 | 2006 |