| Bimorph pinned piezoelectric micromachined ultrasonic transducers for space imaging applications Z Shao, S Pala, Y Peng, L Lin Journal of Microelectromechanical Systems 30 (4), 650-658, 2021 | 24 | 2021 |
| Deep learning for non-parameterized MEMS structural design R Guo, F Sui, W Yue, Z Wang, S Pala, K Li, R Xu, L Lin Microsystems & nanoengineering 8 (1), 91, 2022 | 18 | 2022 |
| 3D ultrasonic object detections with> 1 meter range Z Shao, Y Peng, S Pala, Y Liang, L Lin 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 16 | 2021 |
| Improved ring-down time and axial resolution of PMUTs via a phase-shift excitation scheme S Pala, Z Shao, Y Peng, L Lin 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 15 | 2021 |
| Ultrasond-induced haptic sensations via PMUTS S Pala, Z Shao, Y Peng, L Lin 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 13 | 2021 |
| An improved lumped element model for circular-shape pMUTs S Pala, L Lin IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control 2, 83-95, 2022 | 11 | 2022 |
| A single chip directional loudspeaker based on PMUTS Z Shao, S Pala, Y Liang, Y Peng, L Lin 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 11 | 2021 |
| Piezoelectric micromachined ultrasonic transducers (pMUT) with free boundary S Pala, L Lin 2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020 | 11 | 2020 |
| Non-contact surface temperature sensing based on a single bimorph pMUTs array Z Shao, S Pala, Y Liang, T Jiang, L Lin 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020 | 11 | 2020 |
| Radius of curvature measurement using piezoelectric micromachined ultrasonic transducers S Pala, Y Liang, B Eovino, Z Shao, L Lin 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020 | 10 | 2020 |
| Fully transparent piezoelectric ultrasonic transducer with 3D printed substrate S Pala, L Lin 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 10 | 2019 |
| A Lorentz force MEMS magnetometer S Pala, M Çiçek, K Azgın 2016 IEEE SENSORS, 1-3, 2016 | 9 | 2016 |
| Subcutaneous and continuous blood pressure monitoring by PMUTs in an ambulatory sheep Y Peng, S Pala, Z Shao, H Ding, J Xie, L Lin 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 8 | 2022 |
| High-SPL and low-driving-voltage pMUTs by sputtered potassium sodium niobate F Xia, Y Peng, S Pala, R Arakawa, W Yue, PC Tsao, CM Chen, H Liu, ... 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 7 | 2023 |
| A MEMS square Chladni plate resonator S Pala, K Azgın Journal of Micromechanics and Microengineering 26 (10), 105016, 2016 | 7 | 2016 |
| Attenuation of curved structural surfaces in PMUT measurements S Pala, Y Peng, H Ding, J Xie, L Lin 2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021 | 2 | 2021 |
| Thermal sensitivity of the fundamental natural frequency of a resonant MEMS IR detector pixel S Pala, K Azgın Infrared Sensors, Devices, and Applications VII 10404, 192-200, 2017 | 2 | 2017 |
| High-SPL pMUT Array for Mid-Air Haptic Interface F Xia, Y Peng, W Yue, CM Chen, S Pala, R Arakawa, L Lin 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 1 | 2023 |
| Design and Fabrication of a P (VDF-TrFE) Based Piezoelectric Micromachined Ultrasonic Transducer with Acoustic Cavity AT Toymus, MJ Bathaei, S Akinci, S Pala, L Beker 2022 IEEE International Ultrasonics Symposium (IUS), 1-3, 2022 | 1 | 2022 |
| Phased array of ultrasound transducers for depth sensing D Senkal, S Pala US Patent 11,526,018, 2022 | | 2022 |
Liwei LinProfessor of Mechanical Engineering, University of California at BerkeleyVerified email at me.berkeley.edu
