What is the Young's Modulus of Silicon? MA Hopcroft, WD Nix, TW Kenny Journal of microelectromechanical systems 19 (2), 229-238, 2010 | 2085 | 2010 |
Temperature dependence of quality factor in MEMS resonators B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ... Journal of Microelectromechanical systems 17 (3), 755-766, 2008 | 300 | 2008 |
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ... Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006 | 237 | 2006 |
Temperature-compensated aluminum nitride Lamb wave resonators CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2010 | 183 | 2010 |
Temperature-insensitive composite micromechanical resonators R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ... Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009 | 179 | 2009 |
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators B Kim, RN Candler, MA Hopcroft, M Agarwal, WT Park, TW Kenny Sensors and Actuators A: Physical 136 (1), 125-131, 2007 | 176 | 2007 |
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 163 | 2006 |
Micromechanical testing of SU‐8 cantilevers M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, D Moore, J Brugger Fatigue & Fracture of Engineering Materials & Structures 28 (8), 735-742, 2005 | 159 | 2005 |
Micromechanical Testing of SU-8 Cantilevers M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, DF Moore, J Brugger Abstracts of ATEM: International Conference on Advanced Technology in …, 2003 | 159 | 2003 |
Temperature-compensated high-stability silicon resonators R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ... Applied physics letters 90 (24), 244107, 2007 | 145 | 2007 |
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano Applied Physics Letters 97 (8), 083501, 2010 | 127 | 2010 |
AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices CM Lin, WC Lien, VV Felmetsger, MA Hopcroft, DG Senesky, AP Pisano Applied Physics Letters 97 (14), 141907, 2010 | 93 | 2010 |
Thermal isolation of encapsulated MEMS resonators CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ... Journal of Microelectromechanical Systems 17 (1), 175-184, 2008 | 93 | 2008 |
Using the temperature dependence of resonator quality factor as a thermometer MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ... Applied Physics Letters 91 (1), 013505, 2007 | 88 | 2007 |
Effects of stress on the temperature coefficient of frequency in double clamped resonators R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ... The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 84 | 2005 |
Optimal drive condition for nonlinearity reduction in electrostatic microresonators M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ... Applied physics letters 89 (21), 214105, 2006 | 83 | 2006 |
Frequency stability of wafer-scale encapsulated MEMS resonators B Kim, RN Candler, M Hopcroft, M Agarwal, WT Park, TW Kenny The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 71 | 2005 |
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 63 | 2007 |
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ... Journal of Applied Physics 102 (7), 074903, 2007 | 61 | 2007 |
Temperature-stabilized silicon resonators for frequency references MA Hopcroft ProQuest, 2007 | 57 | 2007 |