Alfred Grill
Alfred Grill
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Cited by
100-GHz transistors from wafer-scale epitaxial graphene
YM Lin, C Dimitrakopoulos, KA Jenkins, DB Farmer, HY Chiu, A Grill, ...
Science 327 (5966), 662-662, 2010
Diamond-like carbon: state of the art
A Grill
Diamond and related materials 8 (2-5), 428-434, 1999
Cold plasma in materials fabrication
A Grill
IEEE Press, New York, 1994
Wafer-scale graphene integrated circuit
YM Lin, A Valdes-Garcia, SJ Han, DB Farmer, I Meric, Y Sun, Y Wu, ...
Science 332 (6035), 1294-1297, 2011
Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
A Grill, DA Neumayer
Journal of applied physics 94 (10), 6697-6707, 2003
Tribology of diamondlike carbon and related materials: an updated review
A Grill
Surface and Coatings Technology 94, 507-513, 1997
Diamond-like carbon coatings as biocompatible materials—an overview
A Grill
Diamond and related materials 12 (2), 166-170, 2003
Hydrogenated oxidized silicon carbon material
A Grill, CV Jahnes, VV Patel, LC Perraud
US Patent 6,147,009, 2000
Multi component dielectric layer
SM Gates, A Grill, S Van Nguyen, SV Nitta
US Patent 8,357,608, 2013
Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made
SM Gates, A Grill, DR Medeiros, D Neumayer, S Van Nguyen, VV Patel, ...
US Patent 7,049,247, 2006
SiCOH dielectric
A Afzali-Ardakani, S Gates, A Grill, D Neumayer, S Nguyen, V Patel
US Patent App. 11/336,726, 2007
Review of the tribology of diamond-like carbon
A Grill
Wear 168 (1-2), 143-153, 1993
Transferable device-containing layer for silicon-on-insulator applications
JO Chu, A Grill, DA Herman Jr, KL Saenger
US Patent 6,774,010, 2004
Strained Si NMOSFETs for high performance CMOS technology
K Rim, S Koester, M Hargrove, J Chu, PM Mooney, J Ott, T Kanarsky, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
C-rich carbon boron nitride dielectric films for use in electronic devices
S Van Nguyen, A Grill, TJ Haigh, S Mehta
US Patent 8,476,743, 2013
Ultralow- dielectrics prepared by plasma-enhanced chemical vapor deposition
A Grill, V Patel
Applied Physics Letters 79 (6), 803-805, 2001
Friction control of diamond-like carbon coatings
C Donnet, A Grill
Surface and Coatings Technology 94, 456-462, 1997
Electrical and optical properties of diamond-like carbon
A Grill
Thin solid films 355, 189-193, 1999
Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials
A Grill
Journal of Applied Physics 93 (3), 1785-1790, 2003
Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art
A Grill, SM Gates, TE Ryan, SV Nguyen, D Priyadarshini
Applied Physics Reviews 1 (1), 2014
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