Temperature dependence of quality factor in MEMS resonators B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ... Journal of Microelectromechanical systems 17 (3), 755-766, 2008 | 333 | 2008 |
Real-time temperature compensation of MEMS oscillators using an integrated micro-oven and a phase-locked loop JC Salvia, R Melamud, SA Chandorkar, SF Lord, TW Kenny Journal of Microelectromechanical Systems 19 (1), 192-201, 2009 | 225 | 2009 |
Temperature-insensitive composite micromechanical resonators R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ... Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009 | 203 | 2009 |
Limits of quality factor in bulk-mode micromechanical resonators SA Chandorkar, M Agarwal, R Melamud, RN Candler, KE Goodson, ... 2008 IEEE 21st international conference on micro electro mechanical systems …, 2008 | 200 | 2008 |
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 175 | 2006 |
Temperature-compensated high-stability silicon resonators R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ... Applied physics letters 90 (24), 2007 | 150 | 2007 |
Quantum limit of quality factor in silicon micro and nano mechanical resonators S Ghaffari, SA Chandorkar, S Wang, EJ Ng, CH Ahn, V Hong, Y Yang, ... Scientific reports 3 (1), 3244, 2013 | 149 | 2013 |
Multimode thermoelastic dissipation SA Chandorkar, RN Candler, A Duwel, R Melamud, M Agarwal, ... Journal of applied physics 105 (4), 2009 | 110 | 2009 |
Energy loss in MEMS resonators and the impact on inertial and RF devices M Weinberg, R Candler, S Chandorkar, J Varsanik, T Kenny, A Duwel TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 107 | 2009 |
Thermal isolation of encapsulated MEMS resonators CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ... Journal of Microelectromechanical Systems 17 (1), 175-184, 2008 | 100 | 2008 |
Using the temperature dependence of resonator quality factor as a thermometer MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ... Applied physics letters 91 (1), 2007 | 93 | 2007 |
Effects of stress on the temperature coefficient of frequency in double clamped resonators R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ... The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 92 | 2005 |
Optimal drive condition for nonlinearity reduction in electrostatic microresonators M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ... Applied physics letters 89 (21), 2006 | 89 | 2006 |
Direct detection of Akhiezer damping in a silicon MEMS resonator J Rodriguez, SA Chandorkar, CA Watson, GM Glaze, CH Ahn, EJ Ng, ... Scientific reports 9 (1), 2244, 2019 | 83 | 2019 |
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 74 | 2007 |
Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime HK Lee, R Melamud, S Chandorkar, J Salvia, S Yoneoka, TW Kenny Journal of microelectromechanical systems 20 (6), 1228-1230, 2011 | 69 | 2011 |
Composite mechanical transducers and approaches therefor R Melamud, B Kim, M Hopcroft, S Chandorkar, M Agarwal, TW Kenny US Patent 7,824,098, 2010 | 64 | 2010 |
A study of electrostatic force nonlinearities in resonant microstructures M Agarwal, SA Chandorkar, H Mehta, RN Candler, B Kim, MA Hopcroft, ... Applied Physics Letters 92 (10), 2008 | 63 | 2008 |
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ... Journal of Applied Physics 102 (7), 2007 | 63 | 2007 |
High resolution microresonator-based digital temperature sensor CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ... Applied physics letters 91 (7), 2007 | 60 | 2007 |